Chin. Phys. Lett.  2006, Vol. 23 Issue (1): 178-181    DOI:
Original Articles |
Optimization of Energy Scope for Titanium Nitride Films Grown by Ion Beam-Assisted Deposition
LI Wei;MA Zhong-Quan;WANG Ye;WANG De-Ming
Department of Physics, Shanghai University, Shanghai 200444
Cite this article:   
LI Wei, MA Zhong-Quan, WANG Ye et al  2006 Chin. Phys. Lett. 23 178-181
Download: PDF(220KB)  
Export: BibTeX | EndNote | Reference Manager | ProCite | RefWorks
Abstract The deposited energy during film growth with ion bombardment, correlated to the atomic displacement on the surface monolayer and the underlying bulk, has been calculated by a simplified ion-solid interaction model under binary collision approximation. The separated damage energies caused by Ar ion, different for the surface and the bulk, have been determined under the standard collision cross section and a well-defined surface and bulk atom displacement threshold energy of titanium nitride (TiN). The optimum energy scope shows that the incident energy of Ar+ around 110eV for TiN (111) and 80eV for TiN (200) effectively enhances the mobility of adatom on surface but excludes the damage in underlying bulk. The theoretical prediction and the experimental result are in good agreement in low energy ion beam-assisted deposition.
Keywords: 61.80.Jh      68.55.Ln      81.15.Jj     
Published: 01 January 2006
PACS:  61.80.Jh (Ion radiation effects)  
  68.55.Ln (Defects and impurities: doping, implantation, distribution, concentration, etc.)  
  81.15.Jj (Ion and electron beam-assisted deposition; ion plating)  
TRENDMD:   
URL:  
https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y2006/V23/I1/0178
Service
E-mail this article
E-mail Alert
RSS
Articles by authors
LI Wei
MA Zhong-Quan
WANG Ye
WANG De-Ming
Related articles from Frontiers Journals
[1] PANG Li-Long, WANG Zhi-Guang, YAO Cun-Feng, ZANG Hang, LI Yuan-Fei, SUN Jian-Rong, SHEN Tie-Long, WEI Kong-Fang, ZHU Ya-Bin, SHENG Yan-Bin, CUI Ming-Huan, JIN Yun-Fan. The Structural Modification of LiTaO3 Crystal Induced by 100-keV H-ion Implantation[J]. Chin. Phys. Lett., 2012, 29(6): 178-181
[2] LI Yue,DENG Ai-Hong,**,ZHOU Yu-Lu,ZHOU Bing,WANG Kang,HOU Qing,SHI Li-Qun,QIN Xiu-Bo,WANG Bao-Yi. Helium-Related Defect Evolution in Titanium Films by Slow Positron Beam Analysis[J]. Chin. Phys. Lett., 2012, 29(4): 178-181
[3] ZHANG Li-Ran, DENG Ai-Hong, **, YANG Dong-Xu, ZHOU Yu-Lu, HOU Qing, SHI Li-Qun, ZHONG Yu-Rong, WANG Bao-Yi . Bias Effects on the Growth of Helium-Containing Titanium Films[J]. Chin. Phys. Lett., 2011, 28(7): 178-181
[4] LI Yu-Hong, **, XU Chun-Ping, GAO Chao, WANG Zhi-Guang . Ne2+ Ion Irradiation Induced Swelling Effects in Pyrochlore Ho2Ti2O7 by Using a GIXRD Technique[J]. Chin. Phys. Lett., 2011, 28(6): 178-181
[5] ZHOU Guang-Hong, **, ZHU Yu-Fu, LIN Yue-Bin . Thermal Decay and Reversal of Exchange Bias Field of CoFe/PtMn Bilayer after Ga+ Irradiation[J]. Chin. Phys. Lett., 2011, 28(5): 178-181
[6] SU Yu-Cheng, ZHANG Gu-Ling**, WANG Wen-Zhong, ZOU Bin, AO Le . One-Step Preparation of N-Doped Nanowhisker TiO2 by Micro Arc Oxidation[J]. Chin. Phys. Lett., 2011, 28(2): 178-181
[7] YU Chen-Hui, LIU Cheng, HAN Xiang-Yun, KANG Wei, FANG Yan-Yan, DAI Jiang-Nan, WU Zhi-Hao, CHEN Chang-Qing** . Properties of Si Doped Al0.4Ga0.6N Epilayers with Different AlGaN Window Layer Grown on High Quality AlN Buffer by MOCVD[J]. Chin. Phys. Lett., 2011, 28(2): 178-181
[8] LIU Chun-Xiao, , LIU Tao, LIU Xiu-Hong, WEI Wei**, PENG Bo** . Helium-Implanted Optical Planar Waveguides in Nd3+-Doped Phosphate Glass[J]. Chin. Phys. Lett., 2011, 28(11): 178-181
[9] JI Guo-Jun, SHI Zhi-Ming. AFM and XPS Study of Glass Surface Coated with Titania Nanofilms by Sol-Gel Method[J]. Chin. Phys. Lett., 2010, 27(9): 178-181
[10] WANG Lei, LU Qing-Ming, MA Hong-Ji. Modal Characterization of a Planar Waveguide in Bismuth Borate Crystal[J]. Chin. Phys. Lett., 2009, 26(6): 178-181
[11] FAN Ya-Ming, ZHANG Xing-Wang, YOU Jing-Bi, YING Jie, TAN Hai-Ren, CHEN Nuo-Fu. Growth-Parameter Spaces and Optical Properties of Cubic Boron Nitride Films on Si(001)[J]. Chin. Phys. Lett., 2009, 26(5): 178-181
[12] ZHANG Li-Qing, ZHANG Chong-Hong, YANG Yi-Tao, YAO Cun-Feng, LI Bing-Sheng, SUN You-Mei, SONG Shu-Jian. Surface Disorder of GaN Irradiated by Highly Charged Arq+-Ions[J]. Chin. Phys. Lett., 2009, 26(3): 178-181
[13] FU Yun-Chong, JIN Yun-Fan, YAO Cun-Feng, ZHANG Chong-Hong. Raman Spectroscopy of Irradiation Effect in Three Carbon Allotropes Induced by Low Energy B Ions[J]. Chin. Phys. Lett., 2009, 26(1): 178-181
[14] ZHANG Li-Qing, ZHANG Chong-Hong, YANG Yi-Tao, YAO Cun-Feng, LI Bing-Sheng, JIN Yun-Fan, SUN You-Mei, SONG Shu-Jian. Surface Erosion of GaN Bombarded by Highly Charged 208Pbq+-Ions[J]. Chin. Phys. Lett., 2008, 25(7): 178-181
[15] HUA Wei, YAO Shu-De, WANG Kun, DING Zhi-Bo. Measurement and Analysis of Composition and Depth Profile of H in Amorphous Si1-xCx:H Films[J]. Chin. Phys. Lett., 2008, 25(7): 178-181
Viewed
Full text


Abstract