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Influence of Annealing on Crystal Structure and Properties of SrBi2Ta2O9 Thin Films Prepared by Pulse Laser Deposition |
YANG Ping-xiong;ZHENG Li-rong;WANG Lian-wei;LIN Cheng-lu |
State Key Laboratory of Functional Materials for Information, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050 |
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Cite this article: |
YANG Ping-xiong, ZHENG Li-rong, WANG Lian-wei et al 1996 Chin. Phys. Lett. 13 934-936 |
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Abstract The perovskite-like SrBi2Ta2O9 (SBT) thin films have been fabricated on Si/SiO2/Ti/Pt substrate by pulse laser deposition. The crystallization and ferroelectric property were clearly dependent on the annealing time and temperature. The SBT thin film with fine grain size and well-saturated square hysteresis loop was obtained after annealing at 750°C for 90min. Good ferroelectric properties were obtained from the SBT film annealed under this condition; Pr and Ec were 8.4μC/cm2 and 57kV/cm, respectively.
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Keywords:
77.80.-e
68.35.Fx
42.55.Gp
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Published: 01 December 1996
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