SUPERCONDUCTING FILMS PREPARED BY ELECTRON CYCLOTRON RESONANCE PLASMA IONS DEPOSITION

Chin. Phys. Lett.

1990, Vol. 7

Issue (10): 473-476 DOI:

Original Articles

SUPERCONDUCTING FILMS PREPARED BY ELECTRON CYCLOTRON RESONANCE PLASMA IONS DEPOSITION

WEN Haihu;SHENG Yanya;ZHANG Fengying;SHI Yicai;REN Zhaoxing;CAO Xiaowen

Institute of Plasma Physics, Academia Sinica, Hefei 230031

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WEN Haihu, SHENG Yanya, ZHANG Fengying et al 1990 Chin. Phys. Lett. 7 473-476

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Abstract An Y-Ba-Cu-O superconducting film with onset temperature T_c (onset)= 91K and zero resistance temperature T_c (end)=81.4K has been obtained for the first time by wing electron cyclotron resonance (ECR) plasma ions deposition technique. The relationship between the composition of the film and the atmosphere as well as the distance between the target and substrate has also been given.

Keywords: 74.75.+t 74.70.-b 74.10.+v

Published: 01 October 1990

PACS:	74.75.+t
	74.70.-b	(Superconducting materials other than cuprates)
	74.10.+v	(Occurrence, potential candidates)

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y1990/V7/I10/0473

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	WEN Haihu
	SHENG Yanya
	ZHANG Fengying
	SHI Yicai
	REN Zhaoxing
	CAO Xiaowen

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