Chin. Phys. Lett.  1999, Vol. 16 Issue (11): 853-855    DOI:
Original Articles |
Atomic Force Microscopy of Surface Reconstructed SrTiO3 Vicinal Substrates for Epitaxial Growth of YBa2Cu3O7-δ Thin Films
HU Wen-fei1,2;LI Lin1,2;WANG Tian-sheng1,3;LIU Wei2;TAO Hong-jie1,2;TIAN Yong-jun1,3;CHEN Ying-fei1,2
1National Laboratory for Superconductivity, 2Institute of Physics, Chinese Academy of Sciences, Beijing 100080 3Department of Material Science, Yanshan University, Qinhuangdao 066004
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HU Wen-fei, LI Lin, WANG Tian-sheng et al  1999 Chin. Phys. Lett. 16 853-855
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Abstract SrTiO3(001) vicinal substrates of miscut 1°, 3°, and 6° toward the (001) plane were annealed at 800-1000°C in pure flowing O2 for 6h and examined by atomic force microscopy. The high temperature annealed vicinal SiTiO3(001) displayed arrays of straight steps and smooth terraces. The step heights vary from about 2 to 6 unit cell depending on the annealing temperatures. At 1000°C, step bunching becomes obvious. The height steps of 1 unit cell are difficult to be observed by our atomic force microscopy. The YBa2Cu3O7-δ thin film grows epitaxially on the step-terrace surface with c-axis orientation by magnetron sputtering in the two-dimensional island mode. Prospect of step-flow growth is being discussed.
Keywords: 81. 65. - b      61.16. Ch     
Published: 01 November 1999
PACS:  81. 65. - b  
  61.16. Ch  
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https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y1999/V16/I11/0853
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HU Wen-fei
LI Lin
WANG Tian-sheng
LIU Wei
TAO Hong-jie
TIAN Yong-jun
CHEN Ying-fei
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