Synthesis of Nano-crystalline Diamond Films

Chin. Phys. Lett.

2000, Vol. 17

Issue (5): 376-378 DOI:

Original Articles

Synthesis of Nano-crystalline Diamond Films

ZHANG Fan¹;ZHANG Yu-Feng¹;GAO Qiao-Jun¹;ZHANG Shu-Lin¹,LIN Ting²;PENG Xiao-Fu³;LIN Zeng-Dong³

¹Department of Physics, Peking University, Beijing 100871 ²Department of Physics, National University of Singapore, Singapore 119260 ³Beijing Institute of Powder Metallurgy, Beijing 100078

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ZHANG Fan, ZHANG Yu-Feng, GAO Qiao-Jun et al 2000 Chin. Phys. Lett. 17 376-378

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Abstract We have deposited nano-crystalline diamond films in a routine hot filament chemical vapor deposition system, using CH₄/H₂ gas mixture. We used various measurements such as field emission scanning electron microscopy, micro-Raman spectroscopy, x-ray photoelectron spectroscopy, and transmission electron microscopy for characterization. The result show that the films consist of a crystalline diamond phase with small grain sizes ranging from 20 to 100nm.

Keywords: 81.15.Gh 68.55.-a 61.50.-f 61.16.Bg

Published: 01 May 2000

PACS:	81.15.Gh	(Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))
	68.55.-a	(Thin film structure and morphology)
	61.50.-f	(Structure of bulk crystals)
	61.16.Bg

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https://cpl.iphy.ac.cn/ OR https://cpl.iphy.ac.cn/Y2000/V17/I5/0376

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	ZHANG Fan
	ZHANG Yu-Feng
	GAO Qiao-Jun
	ZHANG Shu-Lin
	LIN Ting
	PENG Xiao-Fu
	LIN Zeng-Dong

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