Precise, Long-Time Displacement Self-Sensing of Piezoelectric Cantilever Actuators Based on Charge Measurement Using the Sawyer–Tower Circuit
Qiang-zhong Wang1 , Gang Wang1 , Fa-xin Li1,2**
1 LTCS and College of Engineering, Peking University, Beijing 1008712 Center for Applied Physics and Technology, Peking University, Beijing 100871
Abstract ：Previous studies show that near linearity exists between displacement and charge of piezoelectric actuators, while studies under higher fields are lacking and long-time displacement self-sensing is still a challenge. Here we indicate that precise, long-time displacement self-sensing can be accomplished using the Sawyer–Tower circuit, where a high-impedance electrometer and a non-leaky capacitor are used to measure the charge. Calibrating the results on a piezoelectric unimorph cantilever shows that the displacement resolution of charge self-sensing is $\sim$3 nm, much better than that of $\sim$40 nm for the calibrating laser sensor. Testing results under a unipolar field up to 2 kV/mm with different periods indicate that a direct proportional relationship holds between charge and displacement with the maximum error of 4.65%. The self-sensing time can be over 20 min or even longer if a higher-impedance electrometer is used.
收稿日期: 2018-06-20
出版日期: 2018-09-15
:
77.22.Ej
(Polarization and depolarization)
77.65.-j
(Piezoelectricity and electromechanical effects)
77.80.Dj
(Domain structure; hysteresis)
77.80.Fm
(Switching phenomena)
77.84.-s
(Dielectric, piezoelectric, ferroelectric, and antiferroelectric materials)
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2018, Vol. 35 
