High-Q Photonic Crystal Cavity in a Single-Mode Silicon Ridge Waveguide
YU Ping1, QIU Chen2,4, HU Ting2, QIU Hui-Ye2, GE Fang-Fang3, JIANG Xiao-Qing2, YANG Jian-Yi2**
1Ningbo Institute of Technology, Zhejiang University, Ningbo 315100 2Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027 3Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201 4Shannon Laboratory, Huawei Technologies Co. Ltd., Longgang, Shenzhen 518129
Abstract：We demonstrate experimentally a high-Q one-dimensional photonic crystal cavity in a widely-used 450×220 nm single mode silicon ridge waveguide. Transmission spectrum measurement is performed by using the vertical fiber-grating coupling characterization method. The Q factor up to 2.6×104 is found by fitting the line shape of the transmission spectrum, and the normalized transmission of nearly 20% is achieved. Three-dimensional finite difference time domain calculations show that the modal volume of the fundamental mode is 1.1(λ/n)3. With the standard silicon waveguide width, the demonstrated 1D PhC cavity may be used as a building block for integrated photonic circuits and on-chip sensing applications.
2013, Vol. 30 
