Design and Fabrication of a 400 GHz InP-Based Arrayed Waveguide Grating with Flattened Spectral Response
ZHANG Xi-Lin** , LIU Song-Tao, LU Dan, ZHANG Rui-Kang, JI Chen
Key Laboratory of Semiconductors Materials, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
Abstract ：A four-channel 400 GHz channel spacing InP-based arrayed waveguide grating with a flattened wavelength response by employing a multimode interference coupler at the input waveguide of the filter is prepared. The fabricated devices show a flattened spectral response with a broadened 3-dB bandwidth up to 3.5 nm, interchannel non-uniformity of <0.7 dB and excellent match to the simulation results.
收稿日期: 2014-12-29
出版日期: 2015-06-01
:
42.82.Et
(Waveguides, couplers, and arrays)
42.82.Gw
(Other integrated-optical elements and systems)
81.15.Gh
(Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))
[1] Barbarin Y, Leijtens X J M, Bente E A J M, Louzao C M, Kooiman J R and Smit M K 2004 IEEE Photon. Technol. Lett. 16 2478 1994 Electron. Lett. 30 300 1997 Electron. Lett. 33 1701 1996 IEEE J. Sel. Top. Quantum Electron. 2 236 2013 J. Lightwave Technol. 31 87 2001 Opt. Express 9 328 2006 Opt. Eng. 45 094601 1996 IEEE Photon. Technol. Lett. 8 1340 2004 IEEE Photon. Technol. Lett. 16 2628 2012 Opt. Express 20 18313 2009 ETRI J. 31 228 2002 Electron. Lett. 38 792 1985 Electron. Lett. 21 581 1994 IEEE Photon. Technol. Lett. 6 1244
[1]
.
[2]
.
[3]
.
[4]
.
[5]
.
[6]
.
[7]
.
[8]
.
[9]
.
[10]
.
[11]
.
[12]
.
[13]
.
[14]
.
[15]
.
2015, Vol. 32 
