Oxygen Ion Implantation Enhanced Silicon-Vacancy Photoluminescence and n-Type Conductivity of Ultrananocrystalline Diamond Films
HU Xiao-Jun** , LI Nian
College of Chemical Engineering and Materials Science, Zhejiang University of Technology, Hangzhou 310014
Abstract ：We report the enhanced silicon-vacancy (Si-V) photoluminescence (PL) intensity and n-type conductivity of ultrananocrystalline diamond (UNCD) films by oxygen ion (O+ + 14 to 1015 cm?2 , the PL intensity and n-type conductivity significantly increase by 6 and 45 times, respectively, after 1000°C annealing. The secondary ion mass spectroscopy mapping measurements show that the content of oxygen is larger in the zone, which has larger content of silicon, indicating that oxygen tends to adhere to silicon. It is suggested that oxygen related Si-V defects are formed, which will enhance the PL intensity and n-type conductivity of UNCD films.
收稿日期: 2013-04-25
出版日期: 2013-11-21
:
81.05.ug
(Diamond)
78.55.Ap
(Elemental semiconductors)
68.55.Ln
(Defects and impurities: doping, implantation, distribution, concentration, etc.)
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2013, Vol. 30 
