中国物理快报  2012, Vol. 29 Issue (3): 38301-038301    DOI: 10.1088/0256-307X/29/3/038301
  CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY 本期目录 | 过刊浏览 | 高级检索 |
Chemical Mechanical Polishing of Ge2Sb2Te5 Using Abrasive-Free Solutions of Iron Trichloride
YAN Wei-Xia**, WANG Liang-Yong, ZHANG Ze-Fang, HE Ao-Dong, ZHONG Min, LIU Wei-Li, WU Liang-Cai, SONG Zhi-Tang
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050
Chemical Mechanical Polishing of Ge2Sb2Te5 Using Abrasive-Free Solutions of Iron Trichloride
YAN Wei-Xia**, WANG Liang-Yong, ZHANG Ze-Fang, HE Ao-Dong, ZHONG Min, LIU Wei-Li, WU Liang-Cai, SONG Zhi-Tang
State Key Laboratory of Functional Materials for Informatics, Laboratory of Nanotechnology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050