1Department of Engineering Mechanics, China University of Petroleum, Qingdao 266555 2Key Laboratory of Transients in Hydraulic Machinery, Ministry of Education, Wuhan 430072 3 School of Mechanical Engineering, Yonsei University, Seoul 120-749, Republic of Korea
Stiction of a Nano-Beam with Surface Effect
LIU Jian-Lin1**, XIA Re2, ZHOU Yue-Ting3
1Department of Engineering Mechanics, China University of Petroleum, Qingdao 266555 2Key Laboratory of Transients in Hydraulic Machinery, Ministry of Education, Wuhan 430072 3 School of Mechanical Engineering, Yonsei University, Seoul 120-749, Republic of Korea
摘要Nanowire stiction is a crucial bottleneck for the development of M/NEMS devices. We present a model of a nano-beam stuck to the substrate in consideration of both surface elasticity and residual surface stress. The critical detachment length can be derived from the transversality condition using the variational method. The effects of the surface parameters on the adhesion of the nano-beam are discussed in detail. These analyses provide some suggestions for engineers in the design and fabrication of more accurate M/NEMS instruments.
Abstract：Nanowire stiction is a crucial bottleneck for the development of M/NEMS devices. We present a model of a nano-beam stuck to the substrate in consideration of both surface elasticity and residual surface stress. The critical detachment length can be derived from the transversality condition using the variational method. The effects of the surface parameters on the adhesion of the nano-beam are discussed in detail. These analyses provide some suggestions for engineers in the design and fabrication of more accurate M/NEMS instruments.
LIU Jian-Lin**;XIA Re;ZHOU Yue-Ting
. Stiction of a Nano-Beam with Surface Effect[J]. 中国物理快报, 2011, 28(11): 116201-116201.
LIU Jian-Lin**, XIA Re, ZHOU Yue-Ting
. Stiction of a Nano-Beam with Surface Effect. Chin. Phys. Lett., 2011, 28(11): 116201-116201.
[1] Cui Y, Zhong Z H, Wang D L, Wang W U, and Lieber C M 2003 Nano Lett. 3 149
[2] Wang Z L, and Song J H 2006 Science 312 242
[3] Wu G H, Ji H F, Hansen K, Thundat T, Datar R, Cote R, Hagan M F, Chakraborty A K and Majumdar A 2001 Proc. Natl. Acad. Sci. USA 98 1560
[4] de Boer M P and Michalske T A 1999 J. Appl. Phys. 86 817
de Boer M P 2007 Exp. Mech. 47 171
[5] Zhao Y P, Wang L S and Yu T X 2003 J. Adhesion Sci. Technol. 17 519
[6] Wiliams J A and Le H R 2006 J. Phys. D: Appl. Phys. 39 R201
[7] Journet C, Moulinet S, Ybert C, Purcell S T and Bocquet L 2005 Europhys. Lett. 71 104
[8] Lu C H, Qi M L, Yang J H, Tang L, Zhang D Y and Ma J M 2006 Chem. Commun. 33 3351
[9] Wei B Q, Vajtai R, Jung Y, Ward J, Zhang R, Ramanath G and Ajayan P M 2004 Nature 416 495
[10] Bico J, Roman B, Moulin L and Boudaoud A 2004 Nature 432 690
Boudaoud A, Bico J and Roman B 2007 Phys. Rev. E 76 060102
[11] Liu J L, Feng X Q, Xia R and Zhao H P 2007 J. Phys. D: Appl. Phys. 40 5564
Liu J L and Feng X Q 2007 Chin. Phys. Lett. 24 2349
[12] Mastrangelo C H and Hsu C H 1993 J. Microelectromech. Syst. 2 33
[13] Makowski J D, Gawarikar A S and Talghader J J 2006 Appl. Phys. Lett. 89 243508
[14] Chen C Q, Shi Y, Zhang Y S, Zhu J and Yan Y J 2006 Phys. Rev. Lett. 96 075505
[15] Miller R E and Shenoy V B 2000 Nanotechnology 11 139
[16] Gurtin M E and Murdoch A I 1975 Arch. Ration. Mech. Anal. 57 291
[17] He J and Lilley C M 2008 Nano Lett. 8 1798
[18] Feng X Q, Xia R, Li X and Li B 2009 Appl. Phys. Lett. 94 011916
[19] Jiang L Y and Yan Z 2010 Physica E 42 2274
[20] Heidelberg A, Ngo L T, Wu B, Phillips M A, Sharma S, Kamins T I, Sader J E and Boland J J 2006 Nano Lett. 6 1101
[21] Wang G F and Feng X Q 2007 Appl. Phys. Lett. 90 231904
Wang G F and Feng X Q 2007 J. Phys. D: Appl. Phys. 42 155411
[22] Bormashenko E and Whyman G 2008 Chem. Phys. Lett. 463 103
[23] Seifert U and Lipowsky R 1990 Phys. Rev. A 42 4768
[24] Oyharcalbal X and Frisch T 2005 Phys. Rev. E 71 036611
[25] Dorfbauer F, Schrefl T, Kirschner M, Hrkac G, Suess D, Ertl O and Fidler J 2006 J. Appl. Phys. 99 08G706
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