Electromechanical Behavior of Interdigitated SiO2 Cantilever Arrays
GUAN Zhi-Qiang1, LUO Gang2, MONTELIUS Lars2, XU Hong-Xing1,2
1Nanoscale Physics and Devices Laboratory, Institute of Physics, Chinese Academy of Sciences, Beijing 1001902Division of Solid State Physics/The Nanometer Structure Consortium, Lund University, Lund S-221 00, Sweden
Electromechanical Behavior of Interdigitated SiO2 Cantilever Arrays
GUAN Zhi-Qiang1, LUO Gang2, MONTELIUS Lars2, XU Hong-Xing1,2
1Nanoscale Physics and Devices Laboratory, Institute of Physics, Chinese Academy of Sciences, Beijing 1001902Division of Solid State Physics/The Nanometer Structure Consortium, Lund University, Lund S-221 00, Sweden
摘要Bending and first flexural mode vibration behavior of electrostatic actuated nanometer-sized interdigitated cantilever arrays are characterized under vacuum conditions. The ``pull-in'' effect in dc driving and the ``hard spring effect'' in ac driving are observed. A mass sensitivity of 20 fg is expected for our devices due to the ultra-small mass of the arm and relative high Q factor. The mass-spring lump model combined with Green's function method is used to fit the dc driving behaviors including the pull-in voltage. For the ac driving case, the polynomial expansion of the capacitive force is used in the model. The successfully fittings of the pull-in voltage and the hard spring effect prove that our simulation method could be used for guiding the geometrical design of cantilever-based sensors.
Abstract：Bending and first flexural mode vibration behavior of electrostatic actuated nanometer-sized interdigitated cantilever arrays are characterized under vacuum conditions. The ``pull-in'' effect in dc driving and the ``hard spring effect'' in ac driving are observed. A mass sensitivity of 20 fg is expected for our devices due to the ultra-small mass of the arm and relative high Q factor. The mass-spring lump model combined with Green's function method is used to fit the dc driving behaviors including the pull-in voltage. For the ac driving case, the polynomial expansion of the capacitive force is used in the model. The successfully fittings of the pull-in voltage and the hard spring effect prove that our simulation method could be used for guiding the geometrical design of cantilever-based sensors.
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2010, Vol. 27 
