Effects of Rapid Cycle Annealing Temperature on TbFe Magnetostrictive Films
JIANG Hong-Chuan, ZHANG Jin-Ping, ZHANG Wan-Li, PENG Bin, ZHANG Wen-Xu, YANG Shi-Qing, ZHANG Huai-Wu
College of Microelectronics and Solid State Electronics, University of Electronic Science and Technology of China, Chengdu 610054
Effects of Rapid Cycle Annealing Temperature on TbFe Magnetostrictive Films
JIANG Hong-Chuan;ZHANG Jin-Ping;ZHANG Wan-Li;PENG Bin;ZHANG Wen-Xu;YANG Shi-Qing;ZHANG Huai-Wu
College of Microelectronics and Solid State Electronics, University of Electronic Science and Technology of China, Chengdu 610054
关键词 ：
75.50.Bb ,
75.60.Nt ,
75.75.+a
Abstract ： The effects of annealing temperature on TbFe films prepared by dc magnetron sputtering were discussed. X-ray diffraction patterns indicate that these polycrystalline films consisting mainly of α-Fe and TbFe2 lave phase with grain sizes less than 25nm can be obtained by a rapid cycle annealing process. Grain sizes can be controlled by varying annealing temperatures. Film hysteresis loop studies show that annealing treatment can improve TbFe film in-plane soft magnetic performances. Magnetic domain structures explored by a magnetic force microscopy show that in the as-deposited films, maze domain structures exist, hence it possesses perpendicular anisotropy and larger anisotropic constant Ku . No domains are observed when annealing temperature is lower than 400°C. However, maze domain structures appear again when annealing temperature is higher than 400°C. Two maxima of magnetostrictive coefficients are obtained at annealing temperatures of 300°C and 500°C in the presence of a 40kA.m-1 external magnetic field.
Key words ：
75.50.Bb
75.60.Nt
75.75.+a
出版日期: 2004-08-01
引用本文:
JIANG Hong-Chuan;ZHANG Jin-Ping;ZHANG Wan-Li;PENG Bin;ZHANG Wen-Xu;YANG Shi-Qing;ZHANG Huai-Wu. Effects of Rapid Cycle Annealing Temperature on TbFe Magnetostrictive Films[J]. 中国物理快报, 2004, 21(8): 1624-1627.
链接本文:
https://cpl.iphy.ac.cn/CN/
或
https://cpl.iphy.ac.cn/CN/Y2004/V21/I8/1624
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2004, Vol. 21 
