1Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 2300272Microelectronics R&D Center, Chinese Academy of Sciences, Beijing 100029
Optimized Optomechanical Micro-Cantilever Array for Uncooled Infrared Imaging
1Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 2300272Microelectronics R&D Center, Chinese Academy of Sciences, Beijing 100029
摘要We present a new substrate-free bimaterial cantilever array made of SiNx and Au for an uncooled micro-optomechanical infrared imaging device. Each cantilever element has an optimized deformation magnification structure. A 160×160 array with a 120μm×120μm pitch is fabricated and an optical readout is used to collectively measure deflections of all microcantilevers in the array. Thermal images of room-temperature objects with higher spatial resolution have been obtained and the noise-equivalent temperature difference of the fabricated focal plane arrays is given statistically and is measured to be about 270mK.
Abstract:We present a new substrate-free bimaterial cantilever array made of SiNx and Au for an uncooled micro-optomechanical infrared imaging device. Each cantilever element has an optimized deformation magnification structure. A 160×160 array with a 120μm×120μm pitch is fabricated and an optical readout is used to collectively measure deflections of all microcantilevers in the array. Thermal images of room-temperature objects with higher spatial resolution have been obtained and the noise-equivalent temperature difference of the fabricated focal plane arrays is given statistically and is measured to be about 270mK.
[1]Rogalski A 2003 Pro. Quant. Electron. 27 59 [2] Zhao Y et al 2002 J. MEMS 11 136 [3] Perazzo T et al 1999 Appl. Phys. Lett. 74 3567 [4] Lim S et al 2005 J. MEMS. 14 683 [5] Duan Z et al 2003 Chin. Phys. Lett. 20 2130 [6] Dong F et al 2007 Sens. Actuators A 133 236 [7] Li C et al 2006 Meas. Sci. Technol. 17 1981 [8] Miao Z et al 2006 Acta Phys. Sin. 55 3208 (inChinese)