中国物理快报  2003, Vol. 20 Issue (12): 2130-2132    
  Original Articles 本期目录 | 过刊浏览 | 高级检索 |
Uncooled Optically Readable Bimaterial Micro-Cantilever Infrared Imaging Device
DUAN Zhi-Hui1, ZHANG Qing-Chuan1, WU Xiao-Ping1, PAN Liang1, CHEN Da-Peng2, WANG Wei-Bing2, GUO Zhe-Ying1
1Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027 2Microelectronics Research and Development Center, Chinese Academy of Sciences, Beijing 100029
Uncooled Optically Readable Bimaterial Micro-Cantilever Infrared Imaging Device
DUAN Zhi-Hui1;ZHANG Qing-Chuan1;WU Xiao-Ping1;PAN Liang1;CHEN Da-Peng2;WANG Wei-Bing2;GUO Zhe-Ying1
1Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027 2Microelectronics Research and Development Center, Chinese Academy of Sciences, Beijing 100029