DUAN Zhi-Hui1, ZHANG Qing-Chuan1, WU Xiao-Ping1, PAN Liang1, CHEN Da-Peng2, WANG Wei-Bing2, GUO Zhe-Ying1
1Key Laboratory of Mechanical Behavior and Design of
Materials, University of Science and Technology of China, Hefei 230027
2Microelectronics Research and Development Center, Chinese Academy of Sciences, Beijing 100029
1Key Laboratory of Mechanical Behavior and Design of
Materials, University of Science and Technology of China, Hefei 230027
2Microelectronics Research and Development Center, Chinese Academy of Sciences, Beijing 100029
Abstract： We develop an uncooled infrared imaging device that contains a SiN-Au bimaterial micro-cantilever arrays detector and an optical read-out section. The detector converts the incident infrared radiation to the cantilever inclination angles, and the optical read-out section converts these angles directly to a visible image through an optical filtering operation to the spectra of the cantilever arrays with a knife-edge filter. The present results with the 140 x 98 cantilever arrays and the 8-bit A/D quantizer suggest that the objects at the temperature of 250°C at the distance as far as 1m can be detected and the noise-equivalent temperature difference (NETD) of the device is about 10 K. The further improvement of NETD is expected to approach about 14 mK with the optimized cantilever design and 12-bit quantizer.
2003, Vol. 20 
