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Pt/Ti Electrodes of PZT Thin Films Patterning by Novel Lift-Off Using ZnO as a Sacrificial Layer |
| LI Jun-Hong;WANG Cheng-Hao;XU Lian;XIE Shu |
| Institute of Acoustics, Chinese Academy of Sciences, Beijing 100080 |
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| Cite this article: |
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LI Jun-Hong, WANG Cheng-Hao, XU Lian et al 2008 Chin. Phys. Lett. 25 310-313 |
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Abstract We achieve a successful novel lift-off of patterning Pt/Ti electrodes on SiO2/Si substrates by employing ZnO sacrificial layer deposition and patterning, successive uniform Pt/Ti deposition and final lift-off. Then we deposit PZT thin films on the electrodes. Compared with the conventional lift-off processes for the electrodes, this novel process does not need post-annealing, which must be performed after conventional lift-off process. It is demonstrated that the electrodes patterned by the novel lift-off process have stronger adhesion. The electrodes and the PZT films on the electrodes are more compact and smoother than those by the conventional lift-off process.
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| Keywords:
81.65.Cf
68.55.-a
42.62.Cf
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Received: 07 September 2007
Published: 27 December 2007
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| PACS: |
81.65.Cf
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(Surface cleaning, etching, patterning)
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68.55.-a
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(Thin film structure and morphology)
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42.62.Cf
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(Industrial applications)
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