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Capillary Adhesion of Microbeams: Finite Deformation Analysis |
| LIU Jian-Lin;FENG Xi-Qiao |
| Department of Engineering Mechanics, Tsinghua University, Beijing 100084 |
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| Cite this article: |
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LIU Jian-Lin, FENG Xi-Qiao 2007 Chin. Phys. Lett. 24 2349-2352 |
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Abstract Capillary force may cause adhesion of devices at micro- and nano-scales.
Considering the fact that large deformation is often involved in adhesion of microbeams, we analysed the capillary adhesion of two beams using finite deformation elasticity theory. The critical adhesion condition can be obtained from the present method as a function of the bending stiffness, Young's contact angle, the spacing of the two beams as well as the surface tensions of the solid and liquid phases. The solution for the capillary adhesion of a beam with a rigid substrate is also given. The results from the finite deformation analysis are compared with that of infinitesimal deformation method in order to show the necessity of accounting for the nonlinear effect associated with large deflection. The method adopted in this study can also be used to solve other adhesion problems associated with van der Waals force or electrostatic force.
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| Keywords:
68.03.Cd
68.35.Np
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Received: 09 April 2007
Published: 25 July 2007
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[1] Palasantzas G 2007 J. Appl. Phys. 101 053512
[2] Wang G W, Zhang Y, Zhao Y P and Yang G T 2004 J.Microelectromech. Syst. 14 1119
[3] Zhang Y and Zhao Y P 2005 J. Adhesion Sci. Technol. 199
[4] Zhao Y P, Wang L S and Yu T X 2003 J. Adhesion Sci. Technol. 17 519
[5] Tang T, Hui C Y and Glassmaker N J 2005 J. R. Soc. Interface 2 505
[6] Gao H J, Wang X, Yao H M, Gorb S and Arzt E 2005 Mech.Mater. 37 275
[7] Liu N, Bai Y L, Xia M F and Ke F J 2005 Chin. Phys.Lett. 22 2012
[8] Wei Z and Zhao Y P 2004 Chin. Phys. Lett. 21 616
[9] Lei Z K, Kang Y L, Qiu Y, Hu M and Cen H 2004 Chin.Phys. Lett. 21 1377
[10] Maboudian R and Howe R T 1997 J. Vac. Sci. Technol. B 15 1
[11] Tas N, Sonnenberg T, Jansen H, Legtenberg R and Elwenspoek M 1996 J. Micromech. Microengin. 6 385
[12] de Boer M P and Michalske T A 1999 J. Appl. Phys. 86817
[13] Mastrangelo C H and Hsu C H 1993 J. Microelectromech.Syst. 2 33
[14] Zhu J, Ru C Q and Mioduchowski A 2006 Acta Mech. 184 33
[15] Journet C, Moulinet S, Ybert C, Purcell S T and Bocquet L 2005 Europhys. Lett. 71 104
[16] Wei B Q, Vajtai R, Jung Y, Ward J, Zhang R, Ramanath G and AjayanP M 2002 Nature 416 495
[17] Lu C H, Qi L M, Yang J H, Tang L, Zhang D Y and Ma J M 2006 Chem. Commun. 33 3551
[18] Bico J, Roman B, Moulin L and Boudaoud A 2004 Nature 432 690
[19] Kim H Y and Mahadevan L 2006 J. Fluid Mech. 548 141
[20] Bisshopp K E and Drucker D C 1945 Q. Appl. Math. 3272 |
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