Chin. Phys. Lett.  2006, Vol. 23 Issue (8): 2303-2306    DOI:
Original Articles |
Demonstration of Four Fundamental Operations of Liquid Droplets for Digital Microfluidic Systems Based on an Electrowetting-on-Dielectric Actuator
YUE Rui-Feng;WU Jian-Gang;ZENG Xue-Feng;KANG Ming;LIU Li-Tian
Institute of Microelectronics, Tsinghua University, Beijing 100084
Cite this article:   
YUE Rui-Feng, WU Jian-Gang, ZENG Xue-Feng et al  2006 Chin. Phys. Lett. 23 2303-2306
Download: PDF(783KB)  
Export: BibTeX | EndNote | Reference Manager | ProCite | RefWorks
Abstract An electrowetting-on-dielectric actuator is developed, in which the liquid is sandwiched between top and bottom plates. For the bottom plate, silicon wafer is used as the substrate, the heavily phosphorus-doped polysilicon film is deposited by low pressure chemical vapour deposition as the microelectrode array, and thermally grown SiO2 film as the dielectric layer. The top plate is a glass plate covered with transparent and conductive indium tin oxide as the ground electrode. In addition, a TeflonR AF1600 film is spun on the surface of both the plates as the hydrophobic layer. The experimental results show that when the gap height between two plates is 133μm, a prototype of the device is capable of creating, transporting, merging and dividing droplets of deionized water in an
air environment with a 70V at 10Hz voltage pulse. This is also established by simulations using the computational fluidic software of CFD-ACE+.
Keywords: 85.85.+j      47.62.+q      68.08.Bc      47.55.Dz      82.35.Gh     
Published: 01 August 2006
PACS:  85.85.+j (Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)  
  47.62.+q  
  68.08.Bc (Wetting)  
  47.55.Dz  
  82.35.Gh (Polymers on surfaces; adhesion)  
TRENDMD:   
URL:  
https://cpl.iphy.ac.cn/       OR      https://cpl.iphy.ac.cn/Y2006/V23/I8/02303
Service
E-mail this article
E-mail Alert
RSS
Articles by authors
YUE Rui-Feng
WU Jian-Gang
ZENG Xue-Feng
KANG Ming
LIU Li-Tian
Related articles from Frontiers Journals
[1] ZHAO An-Di,ZHENG Yong-Jun,YU Xiao-Mei**. Imaging and Characteristics of a Bimaterial Microcantilever FPA Fabricated using Bulk Silicon Processes[J]. Chin. Phys. Lett., 2012, 29(5): 2303-2306
[2] GAO An-Ran, LIU Xiang, GAO Xiu-Li, LI Tie**, GAO Hua-Min, ZHOU Ping, WANG Yue-Lin . A Low Voltage Driven Digital-Droplet-Transporting-Chip by Electrostatic Force[J]. Chin. Phys. Lett., 2011, 28(8): 2303-2306
[3] LI Yi-Gui**, SUN Jian, YANG Chun-Sheng, LIU Jing-Quan, SUGIYAMA Susumu, TANAKA Katsuhiko . Fabrication and Characterization of a Lead Zirconate Titanate Micro Energy Harvester Based on Eutectic Bonding[J]. Chin. Phys. Lett., 2011, 28(6): 2303-2306
[4] ZHANG Fu-Chun, SHA Mao-Lin, REN Xiu-Ping, WU Guo-Zhong, HU Jun, ZHANG Yi. Morphology and Wettability of [Bmim][PF6] Ionic Liquid on HOPG Substrate[J]. Chin. Phys. Lett., 2010, 27(8): 2303-2306
[5] TAN Zhen-Xin, XUE Chen-Yang, HOU Ting-Ting, LIU Jun, ZHANG Bin-Zhen, ZHANG Wen-Dong. Temperature Effects of Piezoresistance Coefficient[J]. Chin. Phys. Lett., 2010, 27(8): 2303-2306
[6] GUAN Zhi-Qiang, LUO Gang, MONTELIUS Lars, XU Hong-Xing,. Electromechanical Behavior of Interdigitated SiO2 Cantilever Arrays[J]. Chin. Phys. Lett., 2010, 27(2): 2303-2306
[7] CAO Li-Xin, ZHANG Feng-Xin, ZHU Yin-Fang, YANG Jin-Ling,. Ultrasensitive Detection of Infrared Photon Using Microcantilever: Theoretical Analysis[J]. Chin. Phys. Lett., 2010, 27(10): 2303-2306
[8] KUO Ju-Nan, CHEN Wei-Lun, JYWE Wen-Yuh. Surface Micromachined Adjustable Micro-Concave Mirror for Bio-Detection Applications[J]. Chin. Phys. Lett., 2009, 26(8): 2303-2306
[9] MIAO Feng-Juan, ZHANG Jie, XU Shao-Hui, WANG Lian-Wei, CHU Jun-Hao, CAO Zhi-Shen, ZHAN Peng, WANG Zhen-Lin. An Array of One-Dimensional Porous Silicon Photonic Crystal Reflector Islands for a Far-Infrared Image Detector[J]. Chin. Phys. Lett., 2009, 26(4): 2303-2306
[10] LI Jing, CHEN Zhi-De. Squeezing Effect of a Nanomechanical Resonator Coupled to a Two-Level System: an Equilibrium Approach[J]. Chin. Phys. Lett., 2009, 26(3): 2303-2306
[11] ZHANG Xing, TAKAHASHI Koji, FUJII Motoo. Charge and Heat Transport in Polycrystalline Metallic Nanostructures[J]. Chin. Phys. Lett., 2008, 25(9): 2303-2306
[12] LIU Hong-Mei, ZHAO Quan-Liang, CAO Mao-Sheng, YUAN Jie, DUAN Zhong-Xia, QIU Cheng-Jun,. Electromechanical Properties of Microcantilever Actuated by Enhanced Piezoelectric PZT Thick Film[J]. Chin. Phys. Lett., 2008, 25(11): 2303-2306
[13] CAO Jing, WANG Jiang-An, JIANG Xing-Zhou, SHI Sheng-Wei. Monte Carlo Simulation of Optical Properties of Wake Bubbles[J]. Chin. Phys. Lett., 2007, 24(2): 2303-2306
[14] MU Can-Jun, ZHANG Fei-Ling, WU Ya-Ming. High-Speed and Large-Scale Electromagnetically Actuated Resonant MEMS Optical Scanner[J]. Chin. Phys. Lett., 2007, 24(12): 2303-2306
[15] YU Yong-Sheng, WEI Qing-Ding. Experimental Study on Physical Mechanism of Drag Reduction of Hydrophobic Materials in Laminar Flow[J]. Chin. Phys. Lett., 2006, 23(6): 2303-2306
Viewed
Full text


Abstract