Detection of NH<suB>2</suB> Radical in Ammonia Radio-Frequency Plasmas by Laser-Induced Resonance Fluorescence

Chin. Phys. Lett.

2001, Vol. 18

Issue (7): 939-941 DOI:

Original Articles

Detection of NH₂ Radical in Ammonia Radio-Frequency Plasmas by Laser-Induced Resonance Fluorescence

GONG Xue-Yu¹;X. R. Duan²;H. Lange²;A. A. Meyer-Plath²

¹Department of Technological Physics, Nanhua University, Hengyang 421001 ²Institute of Low Temperature Plasma Physics, Greifswald, 17489 Germany

Cite this article:

GONG Xue-Yu, X. R. Duan, H. Lange et al 2001 Chin. Phys. Lett. 18 939-941

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Abstract By means of one photon absorption laser-induced resonance fluorescence at 599.5 nm the relative concentrations of amidogen (NH₂) radical in the ammonia (NH₃) radio-frequency (rf) plasma source were measured under different discharge pressures and rf powers. The time dependence of the fluorescence which comes from the radiation 1₀₁ -2₁₁ of the P-branches of the Σ vibronic sub-bands can be described by a single-exponential decay. The decay time of NH₂(A²A₁) Σ (0, 9, 0) rovibronic state was determined. The spatial dependence of the NH₂ density in discharge tube was measured.

Keywords: 52.75.Rx 52.77.Dq

Published: 01 July 2001

PACS:	52.75.Rx
	52.77.Dq	(Plasma-based ion implantation and deposition)

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