| CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES |
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Soft Magnetic Thin Films FeCoHfO for High-Frequency Noise Suppression Applications |
LU Guang-Duo, ZHANG Huai-Wu, TANG Xiao-Li |
| State Key Laboratory of Electronic Thin films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054 |
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| Cite this article: |
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LU Guang-Duo, ZHANG Huai-Wu, TANG Xiao-Li 2010 Chin. Phys. Lett. 27 097501 |
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Abstract A series of FeCoHfO films were fabricated by dc magnetron reactive sputtering at varying partial pressure of oxygen (P O2) from 0 to 11.7%, and the electrical and magnetic properties of films have been studied. It is shown that optimal Fe43.29Co19.51Hf7.49O29.71 films with desired properties can be obtained when the films were prepared under PO2= 5.1%. The films show superior properties of low coercivity, Hc~5.5 Oe, relatively high saturation magnetization, 4πMs~18.3 kG, high anisotropy field Hk~EM>65 Oe, and high electrical resistivity ρ~2675 µΩcm. Permeability spectra shows that the natural ferromagnetic resonant frequency is as high as ~3.1 GHz. The combined merits of the film make the films taken as an ideal candidate material for high-frequency applications such as noise suppressor. In addition, the effects of the film thickness and annealing treatment on the magnetic properties are also reported.
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| Keywords:
75.70.Ak
85.70.Kh
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Received: 26 January 2010
Published: 25 August 2010
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| PACS: |
75.70.Ak
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(Magnetic properties of monolayers and thin films)
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85.70.Kh
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(Magnetic thin film devices: magnetic heads (magnetoresistive, inductive, etc.); domain-motion devices, etc.)
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