Design and Characterization of a Top Cladding for Silicon-on-Insulator Grating Coupler
Nemkova Anastasia, XIAO Xi, YANG Biao, CHU Tao, YU Jin-Zhong, YU Yu-De**
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
Abstract ：An effective top cladding for silicon-on-insulator grating coupler is designed and the validity of the design is confirmed experimentally. The proposed double-layer silicon oxide/silicon nitride (SiO2 /Si3 N4 ) cladding demonstrates antireflection properties and affects a coupling strength of the grating structure. A coupling efficiency of 65% is obtained after cladding layer deposition.
收稿日期: 2012-09-07
出版日期: 2012-11-28
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2012, Vol. 29 
