中国物理快报  2005, Vol. 22 Issue (4): 904-906    
  Original Articles 本期目录 | 过刊浏览 | 高级检索 |
A Movable Mass Spectroscopy Sampling Apparatus for Measuring Spatial Distribution of Neutral Radicals in Silane Plasma
WANG Zhao-Kui, LIN Kui-Xun, LIN Xuan-Ying, QIU Gui-Ming, ZHU Zu-Song
Department of Physics, Shantou University, Shantou 515063
A Movable Mass Spectroscopy Sampling Apparatus for Measuring Spatial Distribution of Neutral Radicals in Silane Plasma
WANG Zhao-Kui;LIN Kui-Xun;LIN Xuan-Ying;QIU Gui-Ming;ZHU Zu-Song
Department of Physics, Shantou University, Shantou 515063