Fabrication of Single Crystalline Silicon on Glass by Smart-Cut Technique
SONG Hua-Qing1,2, SHI Jing2, ZHANG Miao1, LIN Qing1, LIN Cheng-Lu1
1State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050
2Department of Physics, Wuhan University, Wuhan 430072
Fabrication of Single Crystalline Silicon on Glass by Smart-Cut Technique
SONG Hua-Qing1,2;SHI Jing2;ZHANG Miao1;LIN Qing1;LIN Cheng-Lu1
1State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050
2Department of Physics, Wuhan University, Wuhan 430072
Abstract： Single crystalline silicon films are transferred on to a glass substrate by the smart-cut technique, which is based on H+ ions implantation, anodic bonding and layer transfer. Structures of the resulting thin film silicon on glass (SOG) are characterized by transmission-electron microscopy, scanning electron microscopy and Raman spectroscopy. The results show that SOG substrates fabricated by the smart-cut have advantages of steep top Si/glass interface and good monocrystalline Si quality. The Hall-effect measurement indicates that the single crystalline SOG substrates have a better electrical property compared with polycrystalline silicon SOG substrates.
SONG Hua-Qing;SHI Jing;ZHANG Miao;LIN Qing;LIN Cheng-Lu. Fabrication of Single Crystalline Silicon on Glass by Smart-Cut Technique[J]. 中国物理快报, 2003, 20(1): 108-110.
SONG Hua-Qing, SHI Jing, ZHANG Miao, LIN Qing, LIN Cheng-Lu. Fabrication of Single Crystalline Silicon on Glass by Smart-Cut Technique. Chin. Phys. Lett., 2003, 20(1): 108-110.
2003, Vol. 20 
