A new kind of non-contact linear actuator (motor) driven by surface acoustic waves (SAWs) is presented, in which the stators are made from SAW delay lines using 128° YX-LiNbO3 substrates. A fluid layer is introduced between the slider and the stator of the actuator, and the slider is a circular aluminum disk suspended on the surface of the liquid (water) layer. As the SAW is excited on the stator, the SAW is converted to a leaky wave in the interface of the stator and the liquid, and then propagates into the liquid. Owing to the nonlinear effect of wave propagation, acoustic streaming is generated, which pushes the slider to move. By the experiments, the relations between the slider velocity and the experimental parameters, such as the exciting voltage of the SAWs, the thickness and the kinematic viscosity of the liquid layer, are obtained.
A new kind of non-contact linear actuator (motor) driven by surface acoustic waves (SAWs) is presented, in which the stators are made from SAW delay lines using 128° YX-LiNbO3 substrates. A fluid layer is introduced between the slider and the stator of the actuator, and the slider is a circular aluminum disk suspended on the surface of the liquid (water) layer. As the SAW is excited on the stator, the SAW is converted to a leaky wave in the interface of the stator and the liquid, and then propagates into the liquid. Owing to the nonlinear effect of wave propagation, acoustic streaming is generated, which pushes the slider to move. By the experiments, the relations between the slider velocity and the experimental parameters, such as the exciting voltage of the SAWs, the thickness and the kinematic viscosity of the liquid layer, are obtained.
[1] Moroney R M, White R M and Howe R T 1989 IEEE Ultrason. Sym. Proc. 2 745 [2] Shiokawa S, Matsui Y and Ueda T 1989 Proc. IEEE Ultrason. Sym. 1 643 [3] Kurosawa M, Takahashi M and Higuchi T 1996 IEEE Trans. Ultrason. Ferroelectric. Freq. Cont. 43 901 [4] Zhang G M, Cheng L P, Zhang S Y, Yu J and Shui X J 2000 Electron. Lett. 36 1437 [5] Sano A, Matsui Y and Shiokawa S 1997 Proc. IEEE Ultrason. Sym 1 467 [6] Takeuchi M and Nakano K 2005 Proc. IEEE Ultrason. Sym. (Rotterdam, The Netherlands 18-21 September 2005) p 1518 [7] Takeuchi M, Abe H and Yamanouchi K 1994 Proc. IEEE Ultrason. Sym. 1 607 [8] Renaudin A, Tabourier P, Camart J C and Druon C 2006 J. Appl. Phys. 100 161101 [9] Yeo L Y and Friend J R 2009 Biomicrofluidics 3 012002 [10] Nyborg W L 1965 Acoustic Streaming ed Mason W P, Physical Acoustics, Vol. 2 Part B (New York: Academic) chap 11 p 265 [11] Shiokawa S, Matsui Y and Moriizumi T 1989 Jpn. J. Appl. Phys. 28 126 [12] Hu J H, Nakamura K and Ueha S 1997 Ultrasonics 35 459 [13] Betchov R and Criminale W O J 1967 Stability of Parallel Flows (New York: Academic)
2010, Vol. 27 
