Formation for Bass-Relief Microprofiles Based on an Analytic Formulation
SHI Li-Fang, DONG Xiao-Chun, DENG Qi-Ling, LUO Xian-Gang, DU Chun-Lei
State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, PO Box 350, Chengdu 610209
Formation for Bass-Relief Microprofiles Based on an Analytic Formulation
SHI Li-Fang;DONG Xiao-Chun;DENG Qi-Ling;LUO Xian-Gang;DU Chun-Lei
State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, PO Box 350, Chengdu 610209
摘要A method of fast design and fabrication for bass-relief micro-profiles is developed by using an analytic formulation to determine the exposure distribution. Based on an equivalent exposure threshold model, the formulation is simplified for the case of bass-relief profile corresponding to the smaller exposure dose. The mask function for a microlens array is designed without iteration involved by the analytic formulation. The experiment is performed to validate the method, and the fabrication result is obtained with the profile error less than 30nm (rms).
Abstract：A method of fast design and fabrication for bass-relief micro-profiles is developed by using an analytic formulation to determine the exposure distribution. Based on an equivalent exposure threshold model, the formulation is simplified for the case of bass-relief profile corresponding to the smaller exposure dose. The mask function for a microlens array is designed without iteration involved by the analytic formulation. The experiment is performed to validate the method, and the fabrication result is obtained with the profile error less than 30nm (rms).
SHI Li-Fang;DONG Xiao-Chun;DENG Qi-Ling;LUO Xian-Gang;DU Chun-Lei. Formation for Bass-Relief Microprofiles Based on an Analytic Formulation[J]. 中国物理快报, 2007, 24(10): 2867-2869.
SHI Li-Fang, DONG Xiao-Chun, DENG Qi-Ling, LUO Xian-Gang, DU Chun-Lei. Formation for Bass-Relief Microprofiles Based on an Analytic Formulation. Chin. Phys. Lett., 2007, 24(10): 2867-2869.
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