| 2007, Vol. 24(10): 2867-2869 DOI: | ||
| Formation for Bass-Relief Microprofiles Based on an Analytic Formulation | ||
| SHI Li-Fang, DONG Xiao-Chun, DENG Qi-Ling, LUO Xian-Gang, DU Chun-Lei | ||
| State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, PO Box 350, Chengdu 610209 | ||
| 收稿日期 2007-06-15 修回日期 1900-01-01 | ||
| Supporting info | ||
[1] Du C L, Dong X C, Deng Q L and Qiu C K 2004 Opt. Eng. [2] He M, Yuan X and Bu J 2004 Opt. Lett. 29 2004 [3] Oppliger Y, Sixt P, Stauffer J M, Mayor J M, Regnault P and Voirin [4] Dill F H, Hornberger W P, Hauge P S and Shaw J M 1975 IEEE [5] Chen B, Guo L R, Tang J Y and Tian W J 1996 SPIE 2866 [6] Chen B, Guo L R, Tang J Y and Xu P 1996 SPIE 2687 142 [7] Dong X C, Du C L, Li S H, Wang C T and Fu Y Q 2005 Opt. |
||