1Beijing National Research Center for Information Science and Technology, Beijing Innovation Center for Future Chips, Electronic Engineering Department, Tsinghua University, Beijing 100084 2Beijing Academy of Quantum Information Sciences, Beijing 100193 3State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050 4University of Chinese Academy of Sciences, Beijing 100049
Abstract：A silicon shallow-ridge waveguide integrated superconducting nanowire single photon detector is designed and fabricated. At the bias current of 11.6 $\mu$A, 4% on-chip detection efficiency near 1550 nm wavelength is achieved with the dark count rate of 3 Hz and a timing jitter of 75 ps. This device shows the potential application in the integration of superconducting nanowire single photon detectors with a complex quantum photonic circuit.
Santagati R, Silverstone J W, Strain M J, Sorel M, Miki S, Yamashita T, Fujiwara M, Sasaki M, Terai H, Tanner M G, Natarajan C M, Hadfield R H, O'Brien J L and Thompson M G 2017 J. Opt.19 114006
[7]
Paesani S, Ding Y, Santagati R, Chakhmakhchyan L, Vigliar C, Rottwitt K, Oxenløwe L K, Wang J, Thompson M G and Laing A 2018 arXiv:1812.03158
[8]
Sibson P, Erven C, Godfrey M, Miki S, Yamashita T, Fujiwara M, Sasaki M, Terai H, Tanner M G, Natarajan C M, Hadfield R H, O'Brien J L and Thompson M G 2017 Nat. Commun.8 13984
[9]
Gol'tsman G N, Okunev O, Chulkova G, Lipatov A, Semenov A, Smirnov K, Voronov B, Dzardanov A, Williams C and Sobolewski R 2001 Appl. Phys. Lett.79 705
[10]
Marsili F, Verma V B, Stern J A, Harrington S, Lita A E, Gerrits T, Vayshenker I, Baek B, Shaw M D, Mirin R P and Nam S W 2013 Nat. Photon.7 210
Yang X Y, Li H, Zhang W J, You L X, Zhang L, Liu X Y, Wang Z, Peng W, Xie X M and Jiang M H 2014 Opt. Express22 16267
[16]
Sprengers J P, Gaggero A, Sahin D, Jahanmirinejad S, Frucci G, Mattioli F, Leoni R, Beetz J, Lermer M, Kamp M, Höfling S, Sanjines R and Fiore A 2011 Appl. Phys. Lett.99 181110
[17]
Pernice W H, Schuck C, Minaeva O, Li M, Goltsman G N, Sergienko A V and Tang H X 2012 Nat. Commun.3 1325
[18]
Kahl O, Ferrari S, Kovalyuk V, Goltsman G N, Korneev A and Pernice W H P 2015 Sci. Rep.5 10941
[19]
Rath P, Kahl O, Ferrari S, Sproll F, Lewes-Malandrakis G, Brink D, Ilin K, Siegel M, Nebel C and Pernice W 2015 Light: Sci. Appl.4 e338
Dong P, Qian W, Liao S, Liang H, Kung C C, Feng N N, Shafiiha R, Fong J, Feng D and Krishnamoorthy A V 2010 Opt. Express18 14474
[24]
Annunziata A J, Quaranta O, Santavicca D F, Casaburi A, Frunzio L, Ejrnaes M, Rooks M J, Cristiano R, Pagano S, Frydman A and Prober D E 2010 J. Appl. Phys.108 084507
2019, Vol. 36 
