2011, Vol. 28(11): 114301-114301    DOI: 10.1088/0256-307X/28/11/114301
	Resonance Effects of Bilayered Piezoelectric Films Used for Bulk Acoustic Wave Sensors
	ZHANG Hui**, ZHANG Shu-Yi, FAN Li
	Laboratory of Modern Acoustics, Institute of Acoustics, Nanjing University, Nanjing 210093
	收稿日期 2011-06-24  修回日期 1900-01-01
	Supporting info
	[1] Benetti M et al 2005 Appl. Phys. Lett. 87 173504 [2] Penza M et al 2008 IEEE Trans. Electron. Devices 55 1237 [3] Mikhael D et al 2009 Nature Mater. 8 872 [4] Christopher C D et al 2007 J. Appl. Phys. 101 054514 [5] Martin F et al 2006 IEEE Trans. Ultrason. Ferroelect. Freq. Contr. 53 1339 [6] Yanagitani T et al 2007 IEEE Trans. Ultrason. Ferroelect. Freq. Contr. 54 1680 [7] Kiyoshi N, Kentaro F, Ken Y and Shigemi S 2003 Trans. Ultrason. Ferroelect. Freq. Contr. 5 1558 [8] Yasser E, Gordon H, Sivaram N R and Joseph C B 2006 Trans. Ultrason. Ferroelect. Freq. Contr. 53 1028 [9] Hayward G L and Thompson M 1998 J. Appl. Phys. 83 2194 [10] Akheiser A 1939 J. Phys. 1 277 [11] Tabrizian R, Rais-Zadeh M and Ayazi F 2009 The 15th IEEE International Conference on Solid-state Sensors, Actuators and Microsystems (Denver, Colorado 21–25 June 2009) p 2131 [12] Zhang T, Zhang H, Wang Z Q and Zhang S Y 2007 J. Acoust. Soc. Am. 122 646 [13] Hwang E and Bhave S A 2010 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 57 1664 [14] Zhen X J, Zhou Y C and Li J Y 2003 Acta Materialia 51 3985 [15] Wu S, Lin Z, Lee M and Ro R 2007 Jpn. J. Appl. Phys. 46 3471 [16] Ikeda T 1990 Fundamentals of Piezoelectricity (Oxford: Oxford Science Publications) [17] Rosenbaum J F 1988 Bulk Acoustic Wave Theory and Devices (Norwood, Massachusetts: Artech House) [18] Vorobiev A and Gevorgian S 2010 Appl. Phys. Lett. 96 212904