摘要The resonance vibrations of acoustic sensors with two layers of (1120) textured hexagonal piezoelectric films are studied. When the acoustic and electric fields satisfy a special match condition, i.e. the phase variation of thickness shear mode (TSM) at each film equals π, both piezoelectric layers with opposite polarization directions reduce the first TSM and generate the second TSM with higher frequency and a higher quality factor. The excited second TSM can increase the product of the operating frequency and the quality factor, which is useful for improving the mass sensitivity and resolution of acoustic sensors. Additionally, both of the piezoelectric films have larger thickness and decrease the risk of mechanical damage in device production processes.
Abstract：The resonance vibrations of acoustic sensors with two layers of (1120) textured hexagonal piezoelectric films are studied. When the acoustic and electric fields satisfy a special match condition, i.e. the phase variation of thickness shear mode (TSM) at each film equals π, both piezoelectric layers with opposite polarization directions reduce the first TSM and generate the second TSM with higher frequency and a higher quality factor. The excited second TSM can increase the product of the operating frequency and the quality factor, which is useful for improving the mass sensitivity and resolution of acoustic sensors. Additionally, both of the piezoelectric films have larger thickness and decrease the risk of mechanical damage in device production processes.
(Reflection, refraction, diffraction, interference, and scattering of elastic and poroelastic waves)
引用本文:
ZHANG Hui**;ZHANG Shu-Yi;FAN Li
. Resonance Effects of Bilayered Piezoelectric Films Used for Bulk Acoustic Wave Sensors[J]. 中国物理快报, 2011, 28(11): 114301-114301.
ZHANG Hui**, ZHANG Shu-Yi, FAN Li
. Resonance Effects of Bilayered Piezoelectric Films Used for Bulk Acoustic Wave Sensors. Chin. Phys. Lett., 2011, 28(11): 114301-114301.
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