2011, Vol. 28(6): 68103-068103    DOI: 10.1088/0256-307X/28/6/068103
	Fabrication and Characterization of a Lead Zirconate Titanate Micro Energy Harvester Based on Eutectic Bonding
	LI Yi-Gui1**, SUN Jian1, YANG Chun-Sheng1, LIU Jing-Quan1, SUGIYAMA Susumu2, TANAKA Katsuhiko2
	1Institute of Key Laboratory for Thin Film and Microfabrication Technology (Ministry of Education), Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240 2Global Innovation Research Center, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
	收稿日期 2010-10-09  修回日期 1900-01-01
	Supporting info
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