Fabrication and Characterization of a Lead Zirconate Titanate Micro Energy Harvester Based on Eutectic Bonding
LI Yi-Gui1**, SUN Jian1, YANG Chun-Sheng1, LIU Jing-Quan1, SUGIYAMA Susumu2, TANAKA Katsuhiko2
1Institute of Key Laboratory for Thin Film and Microfabrication Technology (Ministry of Education), Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240 2Global Innovation Research Center, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
Fabrication and Characterization of a Lead Zirconate Titanate Micro Energy Harvester Based on Eutectic Bonding
LI Yi-Gui1**, SUN Jian1, YANG Chun-Sheng1, LIU Jing-Quan1, SUGIYAMA Susumu2, TANAKA Katsuhiko2
1Institute of Key Laboratory for Thin Film and Microfabrication Technology (Ministry of Education), Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240 2Global Innovation Research Center, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
摘要A lead zirconate titanate(PZT)-Si energy harvester cantilever with PZT bulk ceramics is fabricated by eutectic bonding, polishing and dicing processes. The feasibility of this process is studied using a successful operation of the cantilever in both actuation and harvesting modes. The first prototype made from a PZT-Au-Si cantiliever is tested. The testing results show the voltage output of 632 mV at the frequency of 815 Hz when the excitation acceleration is 0.5 g. The PZT and silicon layers are bonded together to form a sandwiched structure using a gold layer as an intermediate layer.
Abstract：A lead zirconate titanate(PZT)-Si energy harvester cantilever with PZT bulk ceramics is fabricated by eutectic bonding, polishing and dicing processes. The feasibility of this process is studied using a successful operation of the cantilever in both actuation and harvesting modes. The first prototype made from a PZT-Au-Si cantiliever is tested. The testing results show the voltage output of 632 mV at the frequency of 815 Hz when the excitation acceleration is 0.5 g. The PZT and silicon layers are bonded together to form a sandwiched structure using a gold layer as an intermediate layer.
LI Yi-Gui**;SUN Jian;YANG Chun-Sheng;LIU Jing-Quan;SUGIYAMA Susumu;TANAKA Katsuhiko
. Fabrication and Characterization of a Lead Zirconate Titanate Micro Energy Harvester Based on Eutectic Bonding[J]. 中国物理快报, 2011, 28(6): 68103-068103.
LI Yi-Gui**, SUN Jian, YANG Chun-Sheng, LIU Jing-Quan, SUGIYAMA Susumu, TANAKA Katsuhiko
. Fabrication and Characterization of a Lead Zirconate Titanate Micro Energy Harvester Based on Eutectic Bonding. Chin. Phys. Lett., 2011, 28(6): 68103-068103.
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