2011, Vol. 28(2): 28101-028101    DOI: 10.1088/0256-307X/28/2/028101
	A Novel Model of the H Radical in Hot-Filament Chemical Vapor Deposition
	GUO Xiao-Song, BAO Zhong, ZHANG Shan-Shan, XIE Er-Qing**
	Key Laboratory for Magnetism and Magnetic Materials of the Ministry of Education, Physical Science and Technology School, Lanzhou University, Lanzhou 730000
	收稿日期 2010-08-16  修回日期 1900-01-01
	Supporting info
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