2008, Vol. 25(6): 2190-2193    DOI:
Interface Evolution of TiN/Poly Si as Gate Material on Si/HfO2 Stack
JIANG Ran, YAO Li-Ting
School of Physics and Microelectronics, Shandong University, Jinan 250100
收稿日期 2007-11-20  修回日期 1900-01-01
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