2008, Vol. 25(11): 4128-4130 DOI: | ||
Electromechanical Properties of Microcantilever Actuated by Enhanced Piezoelectric PZT Thick Film | ||
LIU Hong-Mei1,3, ZHAO Quan-Liang2, CAO Mao-Sheng1,2, YUAN Jie4, DUAN Zhong-Xia2, QIU Cheng-Jun 2,3 | ||
1School of Materials Science and Chemistry, Harbin Engineering University, Harbin 1500012School of Materials Science and Engineering, Beijing Institute of Technology, Beijing 1000813Key Laboratory of Integrated Circuit, Heilongjiang University, Harbin 1500804School of Information Engineering, Central University for Nationalities, Beijing 100081 | ||
收稿日期 2008-08-10 修回日期 1900-01-01 | ||
Supporting info | ||
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