2009, Vol. 26(4): 46101-046101    DOI: 10.1088/0256-307X/26/4/046101
Defects in Si-Rich SiO2 Films Prepared by Radio-Frequency Magnetron Co-sputtering Using Variable Energy Positron Annihilation Spectroscopy
HAO Xiao-Peng1, ZHOU Chun-Lan3, WANG Bao-Yi2, WEI Long2
1Division of Thermometry and Material Evaluation, National Institute of Metrology, Beijing 1000132Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 1000493Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing 100190
收稿日期 2009-01-05  修回日期 1900-01-01
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