2009, Vol. 26(4): 48103-048103    DOI: 10.1088/0256-307X/26/4/048103
Highly Strained Si Films with Ultra-low Dislocation Density Grown on Virtual Substrates of Thin Thickness
YANG Hong-Bin, ZHANG Xiang-Jiu
Surface Physics Laboratory (National Key Laboratory), Fudan University, Shanghai 200433
收稿日期 2008-11-13  修回日期 1900-01-01
Supporting info

[1] Lee M L, Fitzgerald E A, Bulsara M T, Currie M T and
Lochtefeld A 2005 J. Appl. Phys. 97 011101

[2] Khare P, Schroder D and R. Sampson 2007 Solid State
Electron. 51 828

[3] Krishnamohan T, Krivokapic Z, Uchida K, Nishi Y and
Saraswat K C 2006 IEEE Electron. Dev. 53 990

[4] Takagi S I, Hoyt J L, Welser J J and Gibbons J F 1996
J. Appl. Phys. 80 1567

[5] Oberhuber R, Zandler G and Vogl P 1998 Phys. Rev. B
58 9941

[6] Fitzgerald E A, Xie Y H, Green M L, Brasen D, Kortan A R,
Michel J, Mii Y J, and Weir B E 1991 Appl. Phys. Lett.
59 811

[7] Capewell A D, Grasby T J, Whall T E and Parker E H C 2002
Appl. Phys. Lett. 81 4775

[8] Ishizaka A and Shiraki Y 1986 J. Electrochem. Soc.
133 666

[9] Werner J, Lyutovich K and Parry C P 2004 Eur. Phys.
J. Appl. Phys. 27 367

[10] Rath S, Hsieh M L, Etchegoin P and Stradling R A 2003
Semicond. Sci. Technol. 18 566

[11] Tsang J C, Mooney P M, Dacol F and Chu J O 1994 J.
Appl. Phys. 75 8098

[12] Langdo T A, Currie M T, Lochtefeld A, Hammond R, Carlin J
A, Erdtmann M, Braithwaite G, Yang V K, Vineis C J, Badawi H and
Bulsara M T 2003 Appl. Phys. Lett. 82 4256

[13] Hsu J W P, Fitzgerald E A, Xie Y H, Silverman P J and
Cardillo M J 1992 Appl. Phys. Lett. 61 1293

[14] Murakami E, Nishida A, Etoh H, Nakagawa K and Miyao M
1990 Mater. Res. Soc. Symp. Proc. 198 57

[15] Xiong H, Zhang X-j, Jiang Z M, Hu J H, Shi B, Zhou X F,
Jiang W R, Hu D Z and Fan Y L 2001 J. Crys. Growth, 233
74

[16] Fischer A and Richter H 1994 J. Appl. Phys.
75 657

[17] Lu X D, Zhang X-j, Yang H B, Fan Y L, Wang W N and Sun Y
Q 2006 Chin. Phys. Lett. 23 220

[18] Hu S M 1991 J. Appl. Phys. 70 R53

[19] Stoica T and Vescan L 1993 J. Crys. Growth,
131 32

[20] Fitzgerald E A, Watson G P, Proano R E, Ast D G, Kirchner
P D, Pettit G D and Woodall J M 1989 J. Appl. Phys. 65
2220