2009, Vol. 26(5): 55202-055202 DOI: 10.1088/0256-307X/26/5/055202 | ||
The influence of Exciting Frequency on N2 and N2+ Vibrational Temperature of Nitrogen Capacitively Coupled Plasma | ||
HUANG Xiao-Jiang, XIN Yu, ZHANG Jie, NING Zhao-Yuan | ||
Jiangsu Key Laboratory of Thin Films, School of Physical Science and Technology, Soochow University, Suzhou 215006 | ||
收稿日期 2008-12-11 修回日期 1900-01-01 | ||
Supporting info | ||
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