2009, Vol. 26(5): 55202-055202    DOI: 10.1088/0256-307X/26/5/055202
The influence of Exciting Frequency on N2 and N2+ Vibrational Temperature of Nitrogen Capacitively Coupled Plasma
HUANG Xiao-Jiang, XIN Yu, ZHANG Jie, NING Zhao-Yuan
Jiangsu Key Laboratory of Thin Films, School of Physical Science and Technology, Soochow University, Suzhou 215006
收稿日期 2008-12-11  修回日期 1900-01-01
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