中国物理快报  2009, Vol. 26 Issue (5): 55202-055202    DOI: 10.1088/0256-307X/26/5/055202
  PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES 本期目录 | 过刊浏览 | 高级检索 |
The influence of Exciting Frequency on N2 and N2+ Vibrational Temperature of Nitrogen Capacitively Coupled Plasma
HUANG Xiao-Jiang, XIN Yu, ZHANG Jie, NING Zhao-Yuan
Jiangsu Key Laboratory of Thin Films, School of Physical Science and Technology, Soochow University, Suzhou 215006
The influence of Exciting Frequency on N2 and N2+ Vibrational Temperature of Nitrogen Capacitively Coupled Plasma
HUANG Xiao-Jiang, XIN Yu, ZHANG Jie, NING Zhao-Yuan
Jiangsu Key Laboratory of Thin Films, School of Physical Science and Technology, Soochow University, Suzhou 215006