2009, Vol. 26(9): 90702-090702    DOI: 10.1088/0256-307X/26/9/090702
Design, Fabrication and Test of a Soft X-Ray Even-Order Transmission Grating
MA Jie, XIE Chang-Qing, LIU Ming, CHEN Bao-Qin, YE Tian-Chun
Key Laboratory of Nano-Fabrication and Novel Devices Integrated Technology, Instititute of Microelectronics, Chinese Academy of Sciences, Beijing 100029
收稿日期 2009-05-27  修回日期 1900-01-01
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