2009, Vol. 26(9): 90702-090702 DOI: 10.1088/0256-307X/26/9/090702 | ||
Design, Fabrication and Test of a Soft X-Ray Even-Order Transmission Grating | ||
MA Jie, XIE Chang-Qing, LIU Ming, CHEN Bao-Qin, YE Tian-Chun | ||
Key Laboratory of Nano-Fabrication and Novel Devices Integrated Technology, Instititute of Microelectronics, Chinese Academy of Sciences, Beijing 100029 | ||
收稿日期 2009-05-27 修回日期 1900-01-01 | ||
Supporting info | ||
[1] Ceglio N M, Kauffman R L, Hawryluk A M and Medecki H 1983 [2] Hovestadt D, Hilchenbach M, B\"{urgi A, Klecker B, [3] Judge D L, McMullin D R, Ogawa H S, Hovestadt D, Klecker [4] Brinkman A C, Gunsing C J T, Kaastra J S, van der Meer R L [5] Canizares C R, Huenemoerder D P, Davis D S, Dewey D, [6] Pollock C J, Asamura K, Baldonado J, Balkey M M, Barker P, [7] Weaver J L, Holland G, Feldman U, Seely J F, and Brown C M [8] Graf A, May M, Beiersdorfer P, Magee E, Lawrence M and [9] Eagleton R T and James S F 2004 Rev. Sci. Instrum. [10] Born M and Wolf E 1980 Principle of Optics (London: [11] Schattenburg M L, Aucoin R J, Fleming R C, Plotnik I, [12] Xu X D, Hong Y L, Tian Y C, Huo T L, Zhou H J, Tao X M, [13] Zhu X L, Ma J, Xie C Q, Ye T C, Liu M, Cao L F, Yang J M [14] Qiu K Q, Xu X D, Liu Y, Hong Y L and Fu S J 2008 [15] Zhu W Z, Wu Y Q, Guo Z, Zhu X L, Ma J, Xie C Q, Shi P X, [16] Chang C H, Zhao Y, Heilmann R K and Schattenburg M L 2008 [17] Shen X X, Yu X Q, Yang X L, Cai L Z, Wang Y R, Dong G Y, [18] Chen X Z and Li H Y 2007 Chin. Phys. Lett. 24 [19] Pu Y Y, Liang G Q, Mao W D, Dong J W and Wang H Z 2007 [20] Isoyan A, W\"{uest A, Wallace J, Jiang F and Cerrina F [21] Zhang Q, Ni P G, Meng Q B, Cheng B Y and Zhang D Z 2003 [22] Attwood D 1999 Soft X-Ray and Extreme Ultraviolet |
||