Design, Fabrication and Test of a Soft X-Ray Even-Order Transmission Grating
MA Jie, XIE Chang-Qing, LIU Ming, CHEN Bao-Qin, YE Tian-Chun
Key Laboratory of Nano-Fabrication and Novel Devices Integrated Technology, Instititute of Microelectronics, Chinese Academy of Sciences, Beijing 100029
Design, Fabrication and Test of a Soft X-Ray Even-Order Transmission Grating
MA Jie, XIE Chang-Qing, LIU Ming, CHEN Bao-Qin, YE Tian-Chun
Key Laboratory of Nano-Fabrication and Novel Devices Integrated Technology, Instititute of Microelectronics, Chinese Academy of Sciences, Beijing 100029
摘要Most transmission gratings in the x-ray region work with their first orders and dispersion is limited by the line density achievable with current fabrication technology. We present a novel design of a two-dimensional x-ray transmission grating. The grating works with higher dispersion using its second orders, and the influence from first and third orders can be suppressed. A grating according to the novel design is fabricated and its diffraction performance is tested in comparison with a traditional x-ray transmission grating with the same line density. The novel grating could be especially useful when high dispersion is desired while the fabrication of high-density gratings becomes more difficult.
Abstract：Most transmission gratings in the x-ray region work with their first orders and dispersion is limited by the line density achievable with current fabrication technology. We present a novel design of a two-dimensional x-ray transmission grating. The grating works with higher dispersion using its second orders, and the influence from first and third orders can be suppressed. A grating according to the novel design is fabricated and its diffraction performance is tested in comparison with a traditional x-ray transmission grating with the same line density. The novel grating could be especially useful when high dispersion is desired while the fabrication of high-density gratings becomes more difficult.
MA Jie;XIE Chang-Qing;LIU Ming;CHEN Bao-Qin;YE Tian-Chun. Design, Fabrication and Test of a Soft X-Ray Even-Order Transmission Grating[J]. 中国物理快报, 2009, 26(9): 90702-090702.
MA Jie, XIE Chang-Qing, LIU Ming, CHEN Bao-Qin, YE Tian-Chun. Design, Fabrication and Test of a Soft X-Ray Even-Order Transmission Grating. Chin. Phys. Lett., 2009, 26(9): 90702-090702.
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2009, Vol. 26 
