| 2010, Vol. 27(2): 28101-028101 DOI: 10.1088/0256-307X/27/2/028101 | ||
| CuInSe2 Films Prepared by a Plasma-Assisted Selenization Process in Different Working Pressures | ||
| YU Tao, ZHANG Yi, LI Bao-Zhang, JIANG Wei-Long, WANG He, CAI Yong-An, LIU Wei, LI Feng-Yan, SUN Yun |
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| Institute of Photo-electronic Thin Film Devices and Technology, and the Tianjin Key Laboratory for Photoelectronic Thin Film Devices and Technology, Nankai University, Tianjin 300071 | ||
| 收稿日期 2009-11-04 修回日期 1900-01-01 | ||
| Supporting info | ||
| [1] Repins I et al 2008 Prog. Photovoltaics 16 235 [2] Powalla M et al 2006 Solar Energy Mater. Solar Cells 90 3158 [3] Kushiya K et al 2009 Thin Solid Films 517 2108 [4] Marsh R E, Pauling L et al 1953 Acta Cryst. 6 71 [5] Lakshmikumar S T et al 1994 J. Appl. Phys. 76 3068 [6] Kosaraju S et al 2005 J. Vac. Sci. Technol. A 23 1202 [7] Yu T et al 2009 Chin. Phys. B (submitted) [8] Yu T et al 2009 Chin. Phys. B (submitted) [9] Deok Kim S et al 2000 Solar Energy Mater. Solar Cells 62 357 [10] Lakshmikumar S T et al 1995 Appl. Phys. Lett. 66 3128 [11] Sun Y A et al 2008 Technique for Producing High Active Selenium Source for Selenization Process and Its Apparatus and Applications China Patent No 2008100530515 (in Chinese) [12] Kim W K 2006 Study of Reaction Pathways and Kinetics In Cu(In$_{x$Ga$_{1-x$)Se Thin Film Growth (Florida: University of Florida) p 109 [13] Xu C M et al 2006 Chin. Phys. Lett. 23 2259 [14] Ishizuka S et al 2009 Solar Energy Mater. Solar Cells 93 792 [15] Guillen J H C 2002 Vacuum 67 659 [16] Lieberman M A and Lichtenberg A J 2005 Principles of Plasma Discharges and Materials Processing (New York: John Wiley {\& Sons, Inc.) |
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