2010, Vol. 27(2): 28503-028503    DOI: 10.1088/0256-307X/27/2/028503
	Electromechanical Behavior of Interdigitated SiO2 Cantilever Arrays
	GUAN Zhi-Qiang1, LUO Gang2, MONTELIUS Lars2, XU Hong-Xing1,2
	1Nanoscale Physics and Devices Laboratory, Institute of Physics, Chinese Academy of Sciences, Beijing 1001902Division of Solid State Physics/The Nanometer Structure Consortium, Lund University, Lund S-221 00, Sweden
	收稿日期 2009-11-16  修回日期 1900-01-01
	Supporting info
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