2008, Vol. 25(9): 3489-3492 DOI: | ||
Etch Damage Evaluation in Integrated Ferroelectric Capacitor Side Wall by Piezoresponse Force Microscopy | ||
WANG Long-Hai1, DAI Ying2, DENG Zhao2 | ||
1School of Electrical and Information Engineering, Wuhan Institute of Technology, Wuhan 4300732State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070 | ||
收稿日期 2008-06-19 修回日期 1900-01-01 | ||
Supporting info | ||
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