2008, Vol. 25(9): 3489-3492    DOI:
Etch Damage Evaluation in Integrated Ferroelectric Capacitor Side Wall by Piezoresponse Force Microscopy
WANG Long-Hai1, DAI Ying2, DENG Zhao2
1School of Electrical and Information Engineering, Wuhan Institute of Technology, Wuhan 4300732State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070
收稿日期 2008-06-19  修回日期 1900-01-01
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