2010, Vol. 27(7): 78101-078101    DOI: 10.1088/0256-307X/27/7/078101
Development and Characterization of Metal-Insulator-Metal Capacitors with SiNx Thin Films by Plasma-Enhanced Chemical Vapor Deposition

WANG Cong, ZHANG Fang, KIM Nam-Young

RFIC Center, Kwangwoon University, Seoul 139701, Korea
收稿日期 2009-11-06  修回日期 1900-01-01
Supporting info

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