2007, Vol. 24(2): 552-554 DOI: | ||
Effects of Substrate Temperature and Nitrogen Pressure on Growth of AlN Films by Pulsed Laser Deposition | ||
LV Lei, LI Qing-Shan, LI Li, ZHANG Li-Chun, WANG Cai-Feng, QI Hong-Xia | ||
Department of Physics, Qufu Normal University, Shandong 273165 | ||
收稿日期 2006-08-25 修回日期 1900-01-01 | ||
Supporting info | ||
[1] Morkoc H, Strite S, Gao G B, Lin M E, Sverdlov B and Burns M 1994 [2] Vispute R D, Narayan J, Wu H and Jagannadham K 1995 J. Appl. [3] Moore W J, Freitas J A, Holm R T, Kovalenkov O and Dmitriev V 2005 [4] Liu F S, Liu Q L, Liang J K, Luo J, Zhang H R, Zhang Y, Sun B J and [5] Chen S W, Lin H F, Sung T T, Wu J D, Kao H L and Chen J S 2003 [6] Ni X F, Zhu L P, Ye Z Z, Zhao Z, Tang H P, Hong W and Zhao B H 2005 [7] Hirato K, Fujioka H, Ito S, Ohta J and Oshima M 2003 Thin [8] Kaya K, Takahashi H, Shibata Y, Kanno Y and Hirai1 T 1997 Jpn. [9] Dovidenko K, Oktyabrsky S and Narayan J 1997 J. Appl. Phys. [10] Xi D J, Zheng Y D, Chen P, Zhao Z M, Chen P, Xie S Y, Jiang R L, [11] Torres V M, Edwards J L, Wilkens B J, Smith D J, Doak R B and [12] Onojima N, Suda J and Matsunami H 2002 Appl. Phys. Lett. [13] Lin W T, Meng L C, Chen G J and Liu H S 1995 Appl. Phys. [14] Gyorgy E, Ristoscu C, Mihailescu I N, Klini A, Vainos N, Fotakis [15] Ristoscu C, Ducu C, Socol G, Craciunoiu F and Mihailescu I N 2005 [16] Ito S, Fujioka H, Ohta J, Takahashi H and Oshima M 2003 Thin [17] Okamoto K, Inoue S, Matsuki N, Kim T W, Fujioka H and Oshima M [18] Inoue S, Okamoto K, Matsuki N, Kim T W and Fujioka H 2006 J. [19] Cullity B 1955 Elements of X-ray Diffraction (London: |
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