2007, Vol. 24(2): 552-554    DOI:
Effects of Substrate Temperature and Nitrogen Pressure on Growth of AlN Films by Pulsed Laser Deposition
LV Lei, LI Qing-Shan, LI Li, ZHANG Li-Chun, WANG Cai-Feng, QI Hong-Xia
Department of Physics, Qufu Normal University, Shandong 273165
收稿日期 2006-08-25  修回日期 1900-01-01
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