2007, Vol. 24(6): 1753-1755    DOI:
Growth of a Novel Periodic Structure of SiC/AlN Multilayers by Low Pressure Chemical Vapour Deposition
ZHAO Yong-Mei, SUN Guo-Sheng, LI Jia-Ye, LIU Xing-Fang, WANG Lei ZHAO
Wan-Shun, LI Jin-Min
Novel Semiconductor Material Laboratory, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083
收稿日期 2007-01-17  修回日期 1900-01-01
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