| 2007, Vol. 24(10): 2963-2966 DOI: | ||
| Influences of Annealing on Residual Stress and Structure of HfO2 Films | ||
| SHEN Yan-Ming1,2, SHAO Shu-Ying1, DENG Zhen-Xia1,2, HE Hong-Bo1, SHAO Jian-Da1, FAN Zheng-Xiu1 |
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| 1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, PO Box 800-211, Shanghai 2018002Graduate School of the Chinese Academy of Sciences, Beijing 100049 | ||
| 收稿日期 2007-04-15 修回日期 1900-01-01 | ||
| Supporting info | ||
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