2008, Vol. 25(2): 563-565    DOI:
Working Pressure Dependence of Properties of Al2O3 Thin Films Prepared by Electron Beam Evaporation
ZHAN Mei-Qiong1, WU Zhong-Lin1, FAN Zheng-xiu2
1Shanghai Second Polytechnic University, Shanghai 2012092Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
收稿日期 2007-11-01  修回日期 1900-01-01
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