2008, Vol. 25(2): 563-565 DOI: | ||
Working Pressure Dependence of Properties of Al2O3 Thin Films Prepared by Electron Beam Evaporation | ||
ZHAN Mei-Qiong1, WU Zhong-Lin1, FAN Zheng-xiu2 | ||
1Shanghai Second Polytechnic University, Shanghai 2012092Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800 | ||
收稿日期 2007-11-01 修回日期 1900-01-01 | ||
Supporting info | ||
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