2010, Vol. 27(9): 98102-098102    DOI: 10.1088/0256-307X/27/9/098102
Preparation and Characteristics of Nanoscale Diamond-Like Carbon Films for Resistive Memory Applications

FU Di1,2, XIE Dan1,2, ZHANG Chen-Hui3, ZHANG Di1,2, NIU Jie-Bin4, QIAN He1,2, LIU Li-Tian1,2

1Institute of Microelectronics, Tsinghua University, Beijing 100084 2Tsinghua National Laboratory for Information Science and Technology, Beijing 100084 3State Key Laboratory of Tribology, Tsinghua University, Beijing 100084 4Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029
收稿日期 2010-04-28  修回日期 1900-01-01
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