Dynamics of Ring-to-Volume Discharge Transition in $H$ Mode in Inductively Coupled Plasma Torches at Atmospheric Pressure
Qi-Jia Guo1,2 , Guo-Hua Ni1,3** , Lin Li1 , Qi-Fu Lin1 , Yan-Jun Zhao1 , Si-Yuan Sui1 , Hong-Bing Xie1 , Wen-Xue Duan1 , Yue-Dong Meng1
1 Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 2300312 University of Science and Technology of China, Hefei 2300263 AnHui Province Key Laboratory of Medical Physics and Technology, Hefei 230031
Abstract :The transition process in ring-to-volume discharge in $H$ mode in inductively coupled plasma torches at atmospheric pressure is investigated by analyzing the time resolved image taken by a high speed camera. The effects of input power, plasma working gas flow rate, and its composition on the transition dynamics are also discussed. The results show that the discharge plasma has experienced ring discharge, and the development stage diffused from the boundary to the center in the confinement tube, and steady volume discharge after entering the $H$ mode. Increasing input power, sheath gas flow rate and hydrogen contents in plasma working gas are all able to lessen the time consumed in the transition process in ring-to-volume discharge.
收稿日期: 2018-03-12
出版日期: 2018-06-24
:
52.50.Qt
(Plasma heating by radio-frequency fields; ICR, ICP, helicons)
52.30.Cv
(Magnetohydrodynamics (including electron magnetohydrodynamics))
引用本文:
. [J]. 中国物理快报, 2018, 35(7): 75202-.
Qi-Jia Guo, Guo-Hua Ni, Lin Li, Qi-Fu Lin, Yan-Jun Zhao, Si-Yuan Sui, Hong-Bing Xie, Wen-Xue Duan, Yue-Dong Meng. Dynamics of Ring-to-Volume Discharge Transition in $H$ Mode in Inductively Coupled Plasma Torches at Atmospheric Pressure. Chin. Phys. Lett., 2018, 35(7): 75202-.
链接本文:
https://cpl.iphy.ac.cn/CN/10.1088/0256-307X/35/7/075202
或
https://cpl.iphy.ac.cn/CN/Y2018/V35/I7/75202
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